1. Pulsed Laser Deposition System
We have two pulsed laser deposition systems.
The PLD system consists of a 248 nm excimer laser and three chambers. Each chamber has 4 or 6 target positions and capability for combinatorial deposition, with substrate temperatures up to about 900˚C in vacuum or oxygen. One chamber has a RHEED system installed and another chamber has a confocal sputter gun.
2. RF magnetron sputter system
Three RF sources, 2” diameter, with substrate heating; sputter-up configuration; loadlocked.
1. Vibrating Sample Magnetometer
Made by ADE model 1660; with vector capability, temperature control (77- 900 K)
2. Torque Magnetometer
3. Magnetoresistance system
Lakeshore VSM and MR system with a heated stage.
4. Optical Microscope